| 像差项 | 像差大小(nm rms) | 校正残差(nm rms) |
| Coma3 | 1000 | 3.2 |
| Astigmatism3 | 1000 | 3.7 |
| Spherical3 | 1000 | 4.2 |
| Trefoil5 | 1000 | 5.9 |
| Astigmatism5 | 1000 | 6.0 |
| Tetrafoil7 | 1000 | 4.2 |
| Trefoil7 | 1000 | 5.4 |
| Pentafoil9 | 1000 | 8.6 |
| Tetrafoil9 | 1000 | 15.2 |